Fabrication and properties of the field emission array with self-alignment gate electrode
A new method for the fabrication of field emis- sion arrays (FEA) based on bulk/surface silicon micromachin- ing and diamond-like-carbon Food Blenders (DLC) coating was developed.A matrix of self-aligned electron field emitters is formed in sil- icon by mean anisotropic etching in alkali solution of the front silicon film through micro holes opened